High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

High aspect ratio silicon ring-shape micropillars fabricated by

High aspect ratio dependent effects in high-density plasma etching

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Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography

PDF) Recent Advances in Reactive Ion Etching and Applications of

Glass based micro total analysis systems: Materials, fabrication

Optimization of deep reactive ion etching for microscale silicon

Deep reactive ion etching - ScienceDirect

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High aspect ratio silicon ring-shape micropillars fabricated by

Fabrication process flow to form an array of high aspect ratio