Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Zhenming Liu's research works Georgia Institute of Technology, Georgia (GT) and other places

Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope

PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Eigenmode operation of piezoelectric resonant gyroscopes

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices. - Abstract - Europe PMC

Summary of frequency response collected from 9 devices across an 8

Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units

PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

The development of micromachined gyroscope structure and circuitry technology. - Abstract - Europe PMC

Performance metrics of the SD-BAW gyroscope

Cross-sectional view of different types of electrodes in out-of-plane

A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation

A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation